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Measurement System Analysis

Example of Measurement System Analysis (MSA) is described in our recent paper presented at SPIE Advanced Lithography 2007 conference (see the paper text below or download attachment for the full illustrated version at the bottom of this page). 

A simple MSA includes: 

  • A Gauge Repeatability and Reproducibility (GRR) study 

An intermediate complexity MSA includes: 

  • Similar tool evaluation and matching 

A very complex MSA includes: 

  • Cross-metrology-techniques and cross-fab tools evaluation and matching 
A full MSA also includes measurement uncertainty analysis and establishing of SI-traceability using thorough reference metrology and Mandel's data analysis. 

Well-tuned metrology helps you to: 

  1. Improve product quality and yield 
  2. Accelerate technology development and time-to-market 
  3. Improve efficiency, productivity and use of process engineering resources 
  4. Prolong and extend your investment in existing equipment and technology 
  5. Lower your overhead 
  6. Boost your bottom line 

See the below paper (full version with illustrations is attached at the bottom of this page) and let us know if you want to outsource your troubled metrology
Vladimir Ukraintsev,
Jan 4, 2010, 10:07 AM